| Author | : Thomas B. Jones |
| Publisher | : Cambridge University Press |
| Total Pages | : 581 |
| Release | : 2013-05-02 |
| Genre | : Technology & Engineering |
| ISBN | : 0521764831 |
A comprehensive MEMS textbook, with worked examples and numerous homework problems.
Micro Electro Mechanical System Design
| Author | : James J. Allen |
| Publisher | : CRC Press |
| Total Pages | : 492 |
| Release | : 2005-07-08 |
| Genre | : Technology & Engineering |
| ISBN | : 1420027751 |
It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved,
Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies
| Author | : Kenichi Takahata |
| Publisher | : BoD – Books on Demand |
| Total Pages | : 238 |
| Release | : 2013-05-29 |
| Genre | : Science |
| ISBN | : 9535110853 |
MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the-art technologies and their future trends, this book focuses on the latest development of devices and fabrication processes in the field of these extremely miniaturized electromechanical systems. The book offers new knowledge and insight into design, fabrication, and packaging, as well as solutions in these aspects for targeted applications, aiming to support scientists, engineers and academic trainees who are engaged in relevant research. In the chapters, practical issues and advances are discussed for flexible microdevices, bioMEMS, intelligent implants, optical MEMS, nanomachined structures and NEMS, and others. Most of the chapters also focus on novel fabrication/packaging processes, including silicon bulk micromachining, laser micromachining, nanolithography, and packaging for implantable microelectronics enabled by nanomaterials.
Electromechanics of Particles
| Author | : Thomas B. Jones |
| Publisher | : Cambridge University Press |
| Total Pages | : 288 |
| Release | : 2005-09-08 |
| Genre | : Science |
| ISBN | : 9780521019101 |
The focus of this book is on the interactions of small particles, in the size range of microns to millimeters, with electric or magnetic fields. This field has particularly useful practical applications, for instance in photocopier technology and lately in the characterization and manipulation of cells and DNA molecules. The author's objective is to bring together diverse examples of field-particle interactions from many areas of science and technology and then to provide a framework for understanding their common electromechanical phenomena. Using examples from dielectrophoresis, magnetic brush xerography, electrorheology, cell electrorotation, and particle chain rotation, Professor Jones introduces a general model--the effective dipole method--to build a set of predictive models for the forces and torques responsible for the important electromechanical effects. In the last part of the book, the author covers the ubiquitous phenomenon of particle chaining. This book will be highly useful to material engineers and scientists, chemists, and biologists who work with particles, powders, or granular materials.
Mechanical Microsensors
| Author | : M. Elwenspoek |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 306 |
| Release | : 2012-12-06 |
| Genre | : Technology & Engineering |
| ISBN | : 3662043211 |
This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in electrical engineering or mechanical engineering. These classical educa tional pro grams do not prepare the engineer for the challenging task of sensor design since sensors are instruments typically bridging the disciplines: one needs a rather deep understanding of both mechanics and electronics. Accordingly, the book contains discussion of the basic engineering sciences relevant to mechanical sensors, hopefully in a way that it is accessible for all colours of engineers. Engi rd th neering students in their 3 or 4 year should have enough knowledge to be able to follow the arguments presented in this book. In this sense, this book should be useful as textbook for students in courses on mechanical microsensors (as is CUf rently being done at the University ofTwente).
Multi-Wafer Rotating MEMS Machines
| Author | : Jeffrey Lang |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 469 |
| Release | : 2009-09-18 |
| Genre | : Technology & Engineering |
| ISBN | : 0387777474 |
The collaboration and research that was developed to produce the MIT Gas Turbine Engine are described in this book. Both the engine and generator are fabricated from silicon using a combination of bulk and surface microfabrication technologies. The book discusses the technical details that have gone into producing the engine and the overall systems-level tradeoffs, in particular its motor compressors and turbine generators, and the decisions that have been made.
The Design of High Performance Mechatronics - 2nd Revised Edition
| Author | : R. Munnig Schmidt |
| Publisher | : IOS Press |
| Total Pages | : 928 |
| Release | : 2014-01-08 |
| Genre | : Technology & Engineering |
| ISBN | : 1614993688 |
Since they entered our world around the middle of the 20th century, the application of mechatronics has enhanced our lives with functionality based on the integration of electronics, control systems and electric drives. This book deals with the special class of mechatronics that has enabled the exceptional levels of accuracy and speed of high-tech equipment applied in the semiconductor industry, realising the continuous shrink in detailing of micro-electronics and MEMS. As well as the more frequently presented standard subjects of dynamics, motion control, electronics and electromechanics, this book includes an overview of systems engineering, optics and precision measurement systems, in an attempt to establish a connection between these fields under one umbrella. Robert Munnig Schmidt is professor in Mechatronic System Design at Delft University of Technology with industrial experience at Philips and ASML in research and development of consumer and high-tech systems. He is also director of RMS Acoustics & Mechatronics, doing research and development on active controlled low frequency sound systems. Georg Schitter is professor at the Automation and Control Institute (ACIN) at Vienna University of Technology with a standing track record in research on the control and mechatronic design of extremely fast precision motion systems such as video rate AFM systems. Adrian Rankers is managing partner of Mechatronics Academy, developing and delivering high level courses to the industrial community, based on industrial experience at Philips in the research and development of consumer and high-tech systems. Jan van Eijk is emeritus professor in Advanced Mechatronics at Delft University of Technology. He is also director of MICE BV and partner at Mechatronics Academy, acting as industrial R&D advisor and teacher with experience at Philips in the research and development of consumer and high-tech systems.
Understanding Electro-Mechanical Engineering
| Author | : Lawrence J. Kamm |
| Publisher | : John Wiley & Sons |
| Total Pages | : 420 |
| Release | : 1995-09-05 |
| Genre | : Science |
| ISBN | : 9780780310315 |
With a focus on electromechanical systems in a variety of fields, this accessible introductory text brings you coverage of the full range of electrical mechanical devices used today. You'll gain a comprehensive understanding of the design process and get valuable insights into good design practice. UNDERSTANDING ELECTROMECHANICAL ENGINEERING will be of interest to anyone in need of a non-technical, interdisciplinary introduction to the thriving field of mechatronics.
MEMS: Field Models and Optimal Design
| Author | : Paolo Di Barba |
| Publisher | : Springer |
| Total Pages | : 191 |
| Release | : 2019-06-26 |
| Genre | : Technology & Engineering |
| ISBN | : 3030214966 |
This book highlights numerical models as powerful tools for the optimal design of Micro-Electro-Mechanical Systems (MEMS). Most MEMS experts have a background in electronics, where circuit models or behavioral models (i.e. lumped-parameter models) of devices are preferred to field models. This is certainly convenient in terms of preliminary design, e.g. in the prototyping stage. However, design optimization should also take into account fine-sizing effects on device behavior and therefore be based on distributed-parameter models, such as finite-element models. The book shows how the combination of automated optimal design and field-based models can produce powerful design toolboxes for MEMS. It especially focuses on illustrating theoretical concepts with practical examples, fostering comprehension through a problem-solving approach. By comparing the results obtained using different methods, readers will learn to identify their respective strengths and weaknesses. In addition, special emphasis is given to evolutionary computing and nature-inspired optimization strategies, the effectiveness of which has already been amply demonstrated. Given its scope, the book provides PhD students, researchers and professionals in the area of computer-aided analysis with a comprehensive, yet concise and practice-oriented guide to MEMS design and optimization. To benefit most from the book, readers should have a basic grasp of electromagnetism, vector analysis and numerical methods.
