| Author | : P. Rai-Choudhury |
| Publisher | : SPIE Press |
| Total Pages | : 706 |
| Release | : 1997 |
| Genre | : Technology & Engineering |
| ISBN | : 9780819423795 |
Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.
| Author | : P. Rai-Choudhury |
| Publisher | : IET |
| Total Pages | : 716 |
| Release | : 1997 |
| Genre | : Technology & Engineering |
| ISBN | : 9780852969113 |
Contains useful process details, recipes, tables, charts and includes numerous device applications.
| Author | : P. Rai-Choudhury |
| Publisher | : SPIE Press |
| Total Pages | : 780 |
| Release | : 1997 |
| Genre | : Technology & Engineering |
| ISBN | : 9780819423788 |
The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Copublished with IEE.
| Author | : P. Rai-Choudhury |
| Publisher | : IET |
| Total Pages | : 784 |
| Release | : 1997 |
| Genre | : Technology & Engineering |
| ISBN | : 9780852969069 |
Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.
| Author | : Prosenjit Rai-Choudhury |
| Publisher | : |
| Total Pages | : 776 |
| Release | : 1997 |
| Genre | : Electronic book |
| ISBN | : |
| Author | : Harry J. Levinson |
| Publisher | : SPIE Press |
| Total Pages | : 210 |
| Release | : 1999 |
| Genre | : Photography |
| ISBN | : 9780819430526 |
This text covers lithography process control at several levels, from fundamental through advanced topics. The book is a self-contained tutorial that works both as an introduction to the technology and as a reference for the experienced lithographer. It reviews the foundations of statistical process control as background for advanced topics such as complex processes and feedback. In addition, it presents control methodologies that may be applied to process development pilot lines.
| Author | : P. Rai-Choudhury {u. a. |
| Publisher | : |
| Total Pages | : |
| Release | : |
| Genre | : Microfabrication |
| ISBN | : |
| Author | : P. Rai-Choudhury |
| Publisher | : INSPEC, Incorporated |
| Total Pages | : 0 |
| Release | : 1997 |
| Genre | : Microfabrication |
| ISBN | : 9780852969106 |
